J.E. Lamb, S. Gibbons, R. Trichur, Y. Jiang, K. Mangelson, K. Kremer, D. Janzen
Brewer Science, Inc, US
carbon, nanotube, memory, CNT, NRAM, high-purity, environmental, exposure, impacts
Providing materials for use in semiconductor manufacturing is challenging due to the extreme quality levels required for low metal ion and defect levels. This challenge is much greater for suppliers of materials containing long, high-aspect-ratio nanostructures such as carbon nanotubes (CNTs) to be deposited by spin coating. In addition, safeguards and practices for minimizing environmental and exposure impacts of CNTs in manufacturing and in end devices are key to enable commercial use. This paper will review the quality improvements made by Brewer Science in the development of its third-generation CNT materials and provide a detailed review of safeguards and potential quantities of CNT materials in end use devices.