Technical Proceedings of the 2014 Clean Technology Conference and Trade Show

Cleantech 2014

Chapter 7: Environmental Monitoring Technologies

Authors:
J.E. Lamb, S. Gibbons, R. Trichur, Y. Jiang, K. Mangelson, K. Kremer, D. Janzen
Affilation:
Brewer Science, Inc, US
Pages:
244 - 247
Keywords:
carbon, nanotube, memory, CNT, NRAM, high-purity, environmental, exposure, impacts
Abstract:
Providing materials for use in semiconductor manufacturing is challenging due to the extreme quality levels required for low metal ion and defect levels. This challenge is much greater for suppliers of materials containing long, high-aspect-ratio nanostructures such as carbon nanotubes (CNTs) to be deposited by spin coating. In addition, safeguards and practices for minimizing environmental and exposure impacts of CNTs in manufacturing and in end devices are key to enable commercial use. This paper will review the quality improvements made by Brewer Science in the development of its third-generation CNT materials and provide a detailed review of safeguards and potential quantities of CNT materials in end use devices.
Advancements in Microelectronics-Grade Carbon Nanotube Materials for NRAM® Device Manufacture and Analysis of Carbon Nanotube Mass in End User Devices
ISBN:
978-1-4822-5819-6
Pages:
486