CTSI

News | Publications

Technical Proceedings of the 2008 Clean Technology Conference and Trade Show

Clean Technology 2008

Chapter 6: Green Chemistry & Sustainable Industry Practices

 

Environmentally Sound Photoreactive Cleaning: A Product and Technology Overview

Authors:D.J. Elliott, V.M. Chaplick
Affilation:UVTech Systems, US
Pages:355 - 358
Keywords:photochemical, laser-gas absorption
Abstract:A new simple system has been built and installed in semiconductor plants that uses laser light and oxygen to clean semiconductor and other surfaces without chemicals. This system has only four moving parts, has no waste-treatable by-products, and is small and simple to operate. This paper will present an overview of the use of the system in an industrial plant, show results and describe how it can replace current wet cleaning processes in many industries worldwide that casue significant pollution issues.
ISBN:1-4200-8502-0
Pages:724
Order:Online/Mail/Fax Ordering Options
Indexes:Keywords, Authors, Affiliations
Up

ARPA-E Energy Innovation Summit
Washington DC, Feb. 27-29, 2012


Cleantech 2012
(joint with TechConnect World)
Santa Clara CA, June 19-21, 2012

"We've very much enjoyed being a member of CTSI. In addition to the many networking and conference opportunities, we've found the monthly newsletters to be the best consolidated source of clean technology industry information and updates on policy, grants and market intelligence."

- Patrick J. Piper, QM Power, Inc.

"Ener-G-Rotors is pleased to be a member of CTSI. CTSI has been very supportive of our efforts in clean technology, helping to connect us with key legislators, introducing us to contacts at the DOE, and providing opportunities to network with other clean technology companies."

- Michael Newell, Ener-G-Rotors, Inc.

"The Clean Technology and Sustainable Industries Organization brings together the world's most innovative companies to provide critical thinking and technology solutions to real-world challenges."

- Dr. Ray O Johnson, Senior Vice President and Chief Technology Officer, Lockheed Martin


© Clean Technology and Sustainable Industries Organization. All Rights Reserved.
Terms of Use | Privacy Policy | Contact Us | Subscribe | Site Map