Environmental and Economic Assessment of Nano-Fabrication Processes of Memory Devices

	Clean Technology 2008 Chapter 6: Green Chemistry & Sustainable Industry Practices
	Environmental and Economic Assessment of Nano-Fabrication Processes of Memory Devices
Authors:	L. Dahlben, J.A. Isaacs
Affilation:	Northeastern University, US
Pages:	376 - 379
Keywords:	carbon nanotubes, non-volatile memory, semiconductor fabrication, environmental impact, industrial economics
Abstract:	The unique mechanical, electronic, and non-volatility of carbon nanotubes (CNT) have significant potential to replace current silicon-based switches. However, before fully integrating CNT switches into the semiconductor industry, the production costs and environmental impacts associated with these nanomanufacturing processes must be comprehensively assessed. Life cycle analysis and process-based technical cost models are created to compare both these fabrication processes.
ISBN:	1-4200-8502-0
Pages:	724
Order:	Online/Mail/Fax Ordering Options
Indexes:	Keywords, Authors, Affiliations
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Clean Technology 2008

Chapter 6: Green Chemistry & Sustainable Industry Practices

Environmental and Economic Assessment of Nano-Fabrication Processes of Memory Devices