Clean Technology 2009

Reflow-compatible antireflection coating for next-generation wafer-level optics

Z. Gemici
Massachusetts Institute of Technology, US

Keywords: phone, VGA, microlens, optics, antireflection, coating, nano, lens


An aqueous solution-based organic-inorganic nanocomposite 2-stack antireflection coating that provides <1% reflectance, and does not crack during reflow testing even on the thickest wafer-level VGA microlenses.
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