Clean Technology 2009

Photonic Crystal (PC) Waveguide based Micro-Pressure Sensors

J. Bindra
The University of Western Ontario/C4, CA

Keywords: micro-sensor, micro-electro-mechanical systems, pressure sensor, photonic crystal, silicon-on-insulator, optical waveguides, atomic force microscopy


The innovation in the technology is that it uniquely employs optical waveguide technology coupled with a micromechanical sensing unit that can detect pressure, force or acceleration with high sensitivity. It is developed on the SOI (Silicon-On-Insulator) MEMS platform allowing for compatibility with commercial manufacturing in the future.
Program | Symposia | Short Courses | Expo Press
News | Venue | Subscribe | Contact | Site Map
© Copyright 2009 Clean Technology and Sustainable Industries | All Rights Reserved.