Clean Technology 2009

Magnetic Lithography

S. Marcus
Yeda R&D Co. Ltd., IL

Keywords: MEMS, microfluidics, semiconductors, DNA, Lithography, submicron

Abstract:

A “bottom-up’’ strategy employs the spontaneous assembly of building blocks, based on magnetolithography. Paramagnetic metal masks define the spatial distribution and shape of applied magnetic field. Interactions of magnetic nanoparticles with the substrate according to the field induced by the masks result in a chemically patterned substrate.
 
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